OTF1200X-5-III-SF is a CE certified split 5" (O.D) three-zone tube furnace, which can achieve faster heating up to 1200oC and create a different thermal gradient by adjust three zone temperature. The furnace includes all accessories for immediate use. It is an excellent furnace for annealing, diffusing and sintering sample in various atmospheres.
- One 5" O.D x 1400mm L fused quartz tube and one pair of vacuum sealing flanges with pressure gauge；
- Three 30 segments temperature controllers are installed with K type thermal couple. Microprocessor-based self-tuning PID control provides excellent control without overshootingａnd +/- 1 oC accuracy；
- 800mm long sliding rail is installed with one end flange to make loading & unload sample at easy；
- Two mobile carts are included to support furnace and sliding rail；
- Three flowmeters (range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed in one of mobile cart, which allow to use three types of gas during heat treatment；
- One mechanical pump with KF25 adaptor and SS pipe are included with furnace；
- One digital vacuum gauge is installed on the flange for easy vacuum pressure reading upto10 -4 torr；
- Click picture below to enlarge and to see details；
 |  |  |
| digital vacuum gauge,SS vacuum pipe & ball valve with KF25 adaptor garantee 10-2 torr vacuum | 2" Quartz boat sitting on the slide rail holder is ready used for diffusion, oxidation and anneal. | 5" Quartz tube can accommodate 4" quartz wafer boat without holder. |
| Specifications: | |
|---|---|
| Furnace structure | ● Double layer steel case with two cooling fan, which ensures low surface temperature ● Energy saving high purity fibrous alumina insulation ● 內(nèi)爐膛表面涂有美國進口的高溫氧化鋁涂層可以提高設(shè)備的加熱效率，同時也可以延長爐膛的使用壽命 ● One flange is supported by sliding rail to make sample loading /unloading easy, and another seal flange is installed with a digital vacuum gauge ● One Double Steps Rotary Vane High Speed Vacuum Pump (240 L/m) with Oil is included. |
| Voltage & Power | ● AC 208-240V Single Phase, 50/60 Hz (40A breaker required) ● Powder cord is included without plug ● 7 KW Max |
| Max. Temperature | 1200℃ |
| Continuous Temperature | 1100℃ |
| Max. Heating Rate | ≤20℃/min |
| Tube Size and Flange | ● 125 mm O.D x 120 mm ID. x 1400 mm fused quartz tube included ● Vacuum flanges with valves and pressure gauge are included. Click picture below to see details |
| Heating Zone Length | Three zones: (900mm, 36" in total) ● Zone 1: 229mm (9") ● Zone 2: 457mm (18.0") ● Zone 3: 229 mm (9") |
| Constant Temp. Zone | ● If set three zone at same temperature, constant temperature zone is 25" (625 mm) length within +/- 1℃ ● If using one zone (center zone), constant temperature zone is 4.3" (110 mm) length within +/- 1℃ |
| Temperature Controllers | ● Three Digital Controllers, and each has 30-segement ● Built in protection from over-heated and broken thermo couple |
| Temperature Accuracy | +/- 1℃ |
| Heating Element | Fe-Cr-Al Alloy doped by Mo |
| Dimension | 1080 X 430 x 600mm |
| Net Weight | about 70 kg |
| Warranty & Certificate | ● One year limited warranty (Consumable parts such as processing tubes, o-rings and heating elements are not covered by the warranty, please order the replacement at related products below.) ● CE Certificate |
| Shipping package size after crating | 65x45x35" ( x2) |
| Shipping weight | 540 lbs |
| Shipping weight | ● Gas mixing controls with three floating meters(range: 0-100 ml/min, 0-160 ml/min, 0-250 ml/min) are installed on one cart that allows three types of gases to operate during heating treatment.( click picture below left to see detail specs) ● wo mobile carts are included to allow flange sliding onthe table ● Optional: for precision gas control, you may choose digital mass flow Control system instaed of float-meter at extra cost ( click picture below to see details )   3 Channels Float-meter gas control 3 channels MFC gas control (optional) |
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