漏率：10-10mbar.l/s

材質(zhì)：不銹鋼、鋁合金

密封方式：金屬密封

控制方式：手動、氣動、電磁驅(qū)動

法蘭接口：CF-R、ISO-K、ISO-KF

角閥或直通閥 帶波紋管進(jìn)給裝置

注意事項

拆裝閥門一定要用恰當(dāng)?shù)墓ぞ?，定時做好閥門保養(yǎng)，

規(guī)范的操作和使用有利于延長閥門壽命，保持良好性能。

263 - HV angle valve DN100 - 160High vacuum angle 

valve with bellows feedthrough and large conductance.

264 - HV angle valve (DN10 - 250)High vacuum angle 

valves with bellows feedthrough. Modular design

.

284 - UHV angle valve (DN16, DN40, DN63)UHV angle 

valves. Extremely low outgassing rate.

615 - Butterfly with sealing functionDownstream pressure 

control and isolation valve Compact design Fast operation

 High-performance, integrated controller Low minimum con

trollable conductance

641 - PM-4 / PM-5 Pressure controller for Series 64Pressure 

controller for Series 64.0 valves (with stepper motor) and Series 64.2

 642 - Control gate valveControl gate valves with stepper motor 

for controlling and isolation. A valve in combination with an adaptive

 pressure controller PM4/5 is a pressure control system.

650 - Pendulum valve control systemPressure control and isolation 

valves with pendulum plate for downstream applications. Compact design. 

Fast, virtually particle-free and shock-free operation. Powerful integrated controller.