美國Virtual空壓式真空晶圓吸筆套件分為按鈕式和滑動式，連接連續(xù)真空系統(tǒng)，配套不同規(guī)格PEEK吸筆頭實現(xiàn)4寸、6寸、8寸、12寸Wafers晶圓拾取轉(zhuǎn)移。輕巧的按鈕式PUSH-BUTTON WAFER WAND®常開真空，按下按鈕關(guān)閉真空并釋放晶圓。SLIDE SWITCH WAFER WAND® Kits通過向前滑動開關(guān)來吸取晶圓，向后滑動則關(guān)閉真空并釋放晶片；當開關(guān)處于后部位置時，真空也被阻擋，因此不會對空壓管線系統(tǒng)施加過多的需求。工具均由Static Dissipative Delrin靜電消散樹脂材質(zhì)構(gòu)成，配6英尺2米盤繞真空軟管、倒鉤螺紋適配器、支架和可更換的PEEK聚醚醚酮晶片吸頭。

VIRTUAL VWWB-2A-MW8-1/8八寸晶圓真空吸筆套件，包含1/8英寸內(nèi)徑接口按鈕式筆桿、VMWT-C 8寸PEEK吸筆頭以及VBM-2支架、2米連接氣管VCH-1/8-6、螺紋口轉(zhuǎn)接頭。可根據(jù)廠務(wù)氣源接口規(guī)格尺寸，選擇1/16“、1/8寸、2.5mm套件。

美國VIRTUAL WAFER WAND真空晶圓吸筆套件型號

一、PUSH-BUTTON WAFER WAND® Kits按鈕式套件，常開

VWWB-2A-MW4-1/16：With 1/16” (1.6mm) ID gray vacuum hose - Wafer Tip (VMWT-A) handles wafers up to 4”

VWWB-2A-MW4-2.5mm：With 2.5mm ID black vacuum hose - Wafer Tip (VMWT-A) handles wafers up to 4”

VWWB-2A-MW4-1/8：帶1/8內(nèi)徑接口吸筆桿、VMWT-A 4寸wafer吸筆頭、VCH-1/8-6兩米氣管、支架、螺紋適配接頭

VWWB-2A-MW6-1/16：With 1/16” (1.6mm) ID gray vacuum hose - Wafer Tip (VMWT-B) handles wafers up to 6”

VWWB-2A-MW6-2.5mm：With 2.5mm ID black vacuum hose - Wafer Tip (VMWT-B) handles wafers up to 6”

VWWB-2A-MW6-1/8：帶1/8內(nèi)徑接口吸筆桿、VMWT-B 六寸wafer晶圓吸筆頭、VCH-1/8-6兩米氣管、支架、適配接口

VWWB-2A-MW8-1/16：With 1/16” (1.6mm) ID gray vacuum hose - Wafer Tip (VMWT-C) handles wafers up to 8”

VWWB-2A-MW8-2.5mm：With 2.5mm ID black vacuum hose - Wafer Tip (VMWT-C) handles wafers up to 8”

VWWB-2A-MW8-1/8：帶1/8內(nèi)徑接口吸筆桿、VMWT-C 8寸晶圓吸筆頭、VCH-1/8-6兩米氣管、支架、適配接口

VWWB-2A-MW12-1/16：With 1/16” (1.6mm) ID gray vacuum hose - Wafer Tip (VMWT-D) handles wafers up to 12”

VWWB-2A-MW12-2.5mm：With 2.5mm ID black vacuum hose - Wafer Tip (VMWT-D) handles wafers up to 12”

VWWB-2A-MW12-1/8：帶1/8內(nèi)徑接口吸筆桿、VMWT-D 12寸wafer晶圓吸筆頭、VCH-1/8-6兩米氣管、支架、適配接口

VWWB-2A-SD-1/16筆桿：For 1/16” (1.59mm) ID hose, wafer wａnd only

VWWB-2A-SD-2.5mm握柄：For 2.5mm (2.5mm) ID hose, wafer wａnd only

VWWB-2A-SD-1/8吸筆：For 1/8” (3.18mm) ID hose, wafer wａnd only

VBM-2支架：Bench mount wａnd holder

VBM-4多用途支架：Bench mount holder. Can be used with any of our vacuum handles and pens.

V3014-1/8NPT轉(zhuǎn)接適配頭：Adapt to 1/16” ID hose, for compressed air applications

二、SLIDE SWITCH WAFER WAND® Kits滑動式套件，常閉

VWW-2-SD-MW4-1/16：With 1/16” (1.6mm) ID gray vacuum hose - Wafer Tip (VMWT-A) handles wafers up to 4"

VWW-2-SD-MW4-2.5mm：With 2.5mm ID black vacuum hose - Wafer Tip (VMWT-A) handles wafers up to 4"

VWW-2-SD-MW6-1/16：With 1/16” (1.6mm) ID gray vacuum hose - Wafer Tip (VMWT-B) handles wafers up to 6"

VWW-2-SD-MW6-2.5mm：With 2.5mm ID black vacuum hose - Wafer Tip (VMWT-B) handles wafers up to 6"

VWW-2-SD-MW8-1/16：With 1/16” (1.6mm) ID gray vacuum hose - Wafer Tip (VMWT-C) handles wafers up to 8”

VWW-2-SD-MW8-2.5mm：With 2.5mm ID black vacuum hose - Wafer Tip (VMWT-C) handles wafers up to 8"

VWW-2-SD-MW12-1/16：With 1/16” (1.6mm) ID gray vacuum hose - Wafer Tip (VMWT-D) handles wafers up to 12”

VWW-2-SD-MW12-2.5mm：With 2.5mm ID black vacuum hose - Wafer Tip (VMWT-D) handles wafers up to 12”

VWW-2-SD-1/16手柄：For 1/16” (1.59mm) ID hose, wafer wａnd only

VWW-2-SD-2.5mm筆桿：For 2.5mm (2.5mm) ID hose, wafer wａnd only

VWW-2-SD-1/8吸筆：For 1/8” (3.18mm) ID hose, wafer wａnd only

空壓式晶圓吸筆規(guī)格說明書/download/201804/Virtual_V3200-CLN_VWWB-2A-MW8.pdf

三、STEALTH-WAND™ Kits常開，使用30~70psi壓縮空氣或氮氣

VVSW-NO-MW4：kit with the VMWT-A which handles wafers up to 4”

VVSW-MW6：kit with the VMWT-B which handles wafers up to 6"

VVSW-NO-MW8：kit with the VMWT-C which handles wafers up to 8”，空壓式八寸晶圓吸筆套件

VVSW-MW12：kit with the VMWT-D which handles wafers up to 12”，12寸晶圓吸筆套件空壓式或氮氣氣源

四、STEALTH-WAND™ ELITE Kits常閉，用30~50psi壓縮空氣或氮氣

VVSW-NC-MW4：kit with the VMWT-A which handles wafers up to 4”

VVSW-NC-MW6：kit with the VMWT-B which handles wafers up to 6”

VVSW-NC-MW8：kit with the VMWT-C which handles wafers up to 8”

VVSW-NC-MW12：kit with the VMWT-D which handles wafers up to 12”