Aerotech的 WaferMax T 轉(zhuǎn)臺是需要低高度封裝結(jié)構(gòu)提供高性能應(yīng)用的理想選擇。最初設(shè)計用于滿足精密晶片檢測的需求，WaferMax T已經(jīng)被應(yīng)用到多種應(yīng)用。需要有限旋轉(zhuǎn)時，標(biāo)準(zhǔn)25毫米孔徑允許真空線容易直通穿過。如果連續(xù)旋轉(zhuǎn)是必要的，可選的單或雙端口旋轉(zhuǎn)接頭可以合并。臺面包括一個標(biāo)準(zhǔn)的安裝模式，其允許晶片易于卡盤安裝。

● 薄型封裝結(jié)構(gòu)適用于空間有限的應(yīng)用
● 直接驅(qū)動無刷無槽伺服電機
● 直接耦合的高精度旋轉(zhuǎn)編碼器
● 25毫米孔徑
● 可選配用于真空環(huán)境的旋轉(zhuǎn)接頭

機械設(shè)計

Angular contact bearings are used to maximize performance with respect to wobble, moment stiffness and rotating friction. A thick-walled, precision-ground shaft further minimizes wobble.

Cable management is a snap with integral motor power and feedback connectors. Because the WaferMax T is a self-contained unit, it can be integrated easily into multi-stage stacks. Either a service loop or an integrated Aerotech cable management system (CMS) can be provided for a highly reliable solution.

無刷直驅(qū)

To maximize positioning performance, the WaferMax T utilizes Aerotech’s S-series brushless, slotless motor. This motor has all of the advantages of a brushless direct-drive motor — no brushes to wear, no gear trains to maintain and high acceleration and high speeds. Since it is a slotless, ironless design, there is zero cogging, meaning that there is absolutely no torque ripple. This makes the WaferMax T ideal for applications requiring outstanding contoured motion, smooth scan velocity or precise incremental steps. The low inertia and zero backlash make the WaferMax T the ideal solution for applications requiring frequent directional changes.

精確定位

Performance is assured with a 10,000 lines per revolution encoder that results in 0.065 arc sec resolution. A 2048 line option is also available. The motor and high-performance rotary encoder are directly coupled to a common shaft.

靈活配置

Aerotech manufactures a wide range of servo amplifiers and advanced controllers to provide a complete, integrated package.