Aerotech 的 ABRS 系列旋轉(zhuǎn)空氣軸承平臺(tái)提供的角度定位，速度穩(wěn)定性和低運(yùn)動(dòng)誤差性能在一個(gè)非常低矮的封裝結(jié)構(gòu)中。ABRS旨在滿足晶片檢查，高精度計(jì)量，X射線衍射系統(tǒng)，光學(xué)檢查和制造，以及微機(jī)電系統(tǒng)/納米器件的制造等應(yīng)用的嚴(yán)苛要求。

Aerotech ABRS系列空氣軸承精密直驅(qū)轉(zhuǎn)臺(tái)提供出色的角度定位，速度穩(wěn)定性和運(yùn)動(dòng)性能，并且擁有非常低矮的外形。

● 直驅(qū)無刷無槽伺服電機(jī)
● 非機(jī)械接觸
● 零齒槽效應(yīng)電機(jī)帶來顯著的速度穩(wěn)定性
● 顯著的無抖動(dòng)運(yùn)動(dòng)特性
● 直接耦合的高精度編碼器
● 扁平設(shè)計(jì)的低矮外形
● 直徑：128.1-278.1 mm
● 分辨率： 0.036-0.18 arc-sec
● 雙向重復(fù)性：< 1 arc-sec
● 定位精度：±2 arc-sec

緊湊封裝
The design of the ABRS series direct-drive rotary stage has been optimized to minimize stage height. The low profile of the stage reduces the effective working height of the system, minimizing "stack-up" related errors. In addition to the low overall height, the ABRS series provides a clear aperture that can be used for product feed-through, laser beam delivery, cable clearance or application-specific requirements.

優(yōu)異的機(jī)械設(shè)計(jì)
The ABRS design features large air-bearing surfaces for high stiffness and load capacity, producing not only excellent axial and radial error motions but outstanding tilt error motion, as well. The resultant face error motion is significantly better than other rotary air-bearing tables and spindles, greatly benefiting applications requiring exceptional planar performance.

無刷直驅(qū)
To maximize positioning performance, the ABRS series utilizes Aerotech s S-series slotless, brushless motor. The motor uses an advanced magnetic circuit design to produce high torque output with minimal heat generation. The slotless design is inherently zero-cogging and torque ripple-free. This makes ABRS stages ideal for applications requiring smooth scan velocities at low or high speeds.

精確定位
An optical encoder is standard with the ABRS. When coupled with Aerotech s feedback multipliers and controls, resolutions of <0.03 arc second are achievable.

定制化設(shè)計(jì)
Custom versions of the ABRS are available for rate table and inertial guidance test-stａnd applications.