● 全預(yù)緊空氣軸承
● 兼容450毫米晶圓
● 行程可達(dá)1.2米
● 線性編碼器或激光干涉儀反饋
● 非接觸式設(shè)計(jì)
● 超平滑設(shè)計(jì)，出色的速度穩(wěn)定性

空氣軸承設(shè)計(jì)
By utilizing a magnetic preload, the ABL2000 features a smaller cross-section than typical air-bearing stages without sacrificing load capability. The large air-bearing surfaces provide excellent stiffness, allowing for heavy loading. Proprietary manufacturing techniques result in a stage with unsurpassed pitch, roll and yaw characteristics. Manufactured in Aerotech’s state-of-the-art production facility, the ABL2000 is machined with exacting tolerances that are unachievable by conventional methods.

直線電機(jī)驅(qū)動
The driving force behind this stage is Aerotech’s BLMC brushless linear servomotor. Aerotech’s long history and experience as a motor manufacturer is reflected in this latest design. The BLMC utilizes an ironless forcer, which means there is zero cogging and no attractive forces – resulting in unsurpassed smoothness of motion. Since the stage is friction-free and the motor has zero cogging, extremely fine resolutions are achievable.

零維護(hù)
Our totally noncontact air bearing, noncontact linear motor drive and noncontact feedback device ensure years of maintenance-free operation at the high performance levels that are expected of Aerotech equipment. Because there is no mechanical contact between moving elements, the ABL2000 experiences no wear or reduction in performance over time. Service life is virtually unlimited, and since there is no lubrication – only clean, dry gas – air bearings are ideal for clean room and medical applications.

電纜管理
Years of research have resulted in what is universally considered to be the best cable management system (CMS) in the industry. We carefully optimize the cable bend radius and utilize only the highest quality cable to ensure years of trouble-free operation. In the unlikely event of failure, Aerotech’s modular design makes cable replacement quick and easy with minimal downtime. To facilitate integration into the final system, we include all customer-required cables, air hoses, etc. in our CMS bundle. Both ends are fully connectorized for simple integration into the customer’s machine. High flex ribbon cable versions are also available.