Aerotech的ANT95-L系列平臺是一個行程超過25毫米的納米級定位系統(tǒng)。ANT95-L和ANT95-L-PLUS是當(dāng)今提供的速度、精度、分辨率、重復(fù)精度、可靠性和尺寸的交叉滾柱軸承定位平臺之一，并且提供兩種精度等級。這些線性平臺可以展現(xiàn)高達5g的加速度，500mm/s的速度，增強的負載能力，并且具有標(biāo)準(zhǔn)化，通用基座安裝模式，允許其在大范圍的配置中一起使用。

● 大行程形式下實現(xiàn)納米級性能
● 高分辨率(1納米)，重復(fù)精度(75納米)和精度(250納米)
● 定位穩(wěn)定性<1納米
● 抗蠕變交叉滾柱軸承
● 高動態(tài)性能

非接觸直接驅(qū)動
Only noncontact direct-drive technology offers the robust, accurate and high-speed positioning necessary for mass production of precision devices. ANT95-L stages utilize advanced direct-drive technology pioneered by Aerotech to achieve the highest level of positioning performance. This direct-drive technology is high-performance, non-cogging, noncontact, high-speed, high-resolution and high-accuracy. The unique drive and bearing combination, packaged in an extremely small-profile and footprint, offers tangible advantages in many applications such as high-precision positioning, disk-drive fabrication, fiber alignment, optical delay element actuation, sensor testing and scanning processes that demａnd smooth and precise motion.

靈活的系統(tǒng)設(shè)計
The ANT95-L family has universal mounting and tabletop patterns that allow for easy system integration. Two, three or more axes can be easily combined for flexible system designs and multi-axis configurations.

系統(tǒng)特性
Outstanding accuracy, position repeatability and in-position stability require high system resolution. The ANT95-L stage’s industry-leading 1 nm minimum incremental step size provides this high level of performance. Aerotech’s direct-drive technology has no hysteresis or backlash, enabling accurate and repeatable nanometer-scale motion.