·整合的離子源，便于RGA和SNMS

·各類型樣品的快速轉(zhuǎn)向

·陰、陽離子、中性粒子、自由基的質(zhì)量、能量分析儀

·整合的離子槍光柵控制和信號選通，進行深度分析
·絕緣體研究中的電子流槍用于電荷中和
·液氮冷井和真空室烘烤加熱器
·自動的SIMS 離子光學(xué)透鏡調(diào)諧和質(zhì)量數(shù)列表，使SIMS性能

·Hiden EQS SIMS 分析儀，運行于 MASsoft O/S 之下，檢測限至ppb級

·基本的激發(fā)源選擇： 帶差式泵的Hiden IG20 Ion，IFG200 FAB或高性能液態(tài)鎵槍
·快速樣品傳遞，樣品固定，負載鎖定的操縱器
·4 軸：X, Y, Z, θ UHV 操縱器，以定位樣品
·加上ESM LabVIEW和SIMS 成像程序，進行SIMS元素成像
·靜態(tài)SIMS譜圖庫可用

Mass Spectrometers for Thin Films, Plasma and Surface Engineering (1.1 MB)

SIMS Brochure TI 181 (670 KB)

SIMS Brochure TI 181 HiRes (5.64 MB)

Tour of the Hiden SIMS Workstation (6.22 MB)

Instruments for diagnostics and analysis of thin films

Analysis of Metal-Polymer Interfaces in Thin Film Capacitors by Dynamic Quadrupole SIMS (380 KB)

Analysis of MOCVD-Grown GaInP/Ga(ln)As/Ge Triple Junction Solar Cells by SIMS (182 KB)

Combined SIMS SNMS Poster (1.08 MB)

High Performance SIMS - Mass and Energy Analyser for SIMS - A2 (584 KB)

High Performance SIMS - Mass and Energy Analyser for SIMS - A3 (339 KB)

Simultaneous SIMS and Electron Impact SNMS (347 KB)