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詳細介紹
| The SpecEl-2000-VIS Ellipsometer measures polarized light reflected from the surface of a substrate to determine the thickness and refractive index of the material as a function of wavelength. The SpecEl is controlled via a PC. Measure refractive index, absorbance and thickness with the touch of a button. |
All-in-one Accurate System
The SpecEl houses an integrated light source, a spectrometer and two polarizers fixed to 70°. It also includes a PC with a 32-bit Windows operating system. The SpecEl can detect a single layer as thin as 0.1 nm and up to 5 µm thick. In addition, it can provide refractive indices to 0.005°.
The SpecEl is available for Call for Price.
SpecEl Software and "Recipe" Files
In SpecEl Software, you can configure and save experiment method files for one-step analysis. after creating a "recipe," you can select the recipe to execute the experiment.
Specifications
| Wavelength range: | 380-780 nm (standard) or 450-900 nm (optional) |
| Optical resolution: | 4.0 nm FWHM |
| Accuracy: | 0.1 nm thickness; 0.005% refractive index |
| Angle of incidence: | 70° |
| Film thickness: | 1-5000 nm for single transparent film |
| Spot size: | 2 mm x 4 mm (standard) or 200 µm x 400 µm (optional) |
| Sampling time: | 3-15 seconds (minimum) |
| Kinetic logging: | 3 seconds |
| Mechanical tolerance (height): | +/- 1.5 mm, angle +/- 1.0° |
| Number of layers: | Up to 32 layers |
| Reference: | Not applicable |
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