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北京艾瑪特科技有限公司


當(dāng)前位置:北京艾瑪特科技有限公司>>高精密定位平臺(tái)>>精密 X-Y 直線定位平臺(tái)>>ANT130-XY ULTRA雙軸平臺(tái) | ANT130-XY ULTRA Series Two-Axis XY Direct-Drive Nanopositioning Stages | XY...

ANT130-XY ULTRA雙軸平臺(tái) | ANT130-XY ULTRA Series Two-Axis XY Direct-Drive Nanopositioning Stages | XY...

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聯(lián)系方式:李志剛查看聯(lián)系方式

更新時(shí)間:2024-09-16 07:36:39瀏覽次數(shù):226次

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商鋪產(chǎn)品:365條

所在地區(qū):北京北京市

聯(lián)系人:李志剛 (銷售工程師)

產(chǎn)品簡(jiǎn)介

Aerotech’s ANT130-XY-ULTRA is a long travel (up to 160 mm x 160 mm) nanopositioner for XY applications. Each axis uses crossed-roller bearings, as well as Aerotech’s unique direct-drive for non-coggin......

詳細(xì)介紹

● Integrated low-profile XY linear motor stage
● Nanometer-level performance in a large travel format
● 2D system accuracy is 250 nm
● In-position stability of <1 nm
● High dynamic performance


ULTRA Trajectory Management System
In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, interactive, dynamic trajectory management system. To take advantage of this sophisticated interactive calibration system, the mechanical system has to be completely assembled and functionally tested prior to calibration in our best-in-class metrology labs. Nano-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment and utilizing the formidable capability of ULTIMUS. By implementing the ULTIMUS dynamic trajectory management system with the ANT130-XY-ULTRA, we are able to produce 2-dimensional accuracies of ±250 nm or better.


The plots provided in the Specifications illustrate performance differences between a standard ANT130-XY and the -ULTRA version. Straightness errors, orthogonality errors and accuracy errors caused by stage yawing are virtually eliminated.


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