The demａnd for a high-accuracy, robust, open-frame stage is met with the ALS3600. This dual-axis, large aperture, open-frame stage addresses the unique needs of scanning microscopy, wafer and printed ......
● Large clear aperture
● Travel range from 100 mm x 100 mm to 400 mm x 400 mm
● High performance linear motion guides
● 15 arc sec orthogonality
● Noncontact linear encoder for high accuracy
Design and Construction
The ALS3600 is a three-piece design that allows critical components such as orthogonality, straightness and flatness to be controlled during the initial machining. This results in a stage with exceptional geometric tolerances and inherent orthogonality.
The ALS3600 utilizes high-precision linear motion guide (LMG) bearings, with a total of four trucks per axis. These make the ALS3600 ideal for fast, repetitive operations. The LMG bearings also exhibit exceptional stiffness, high load capacity and extremely low friction.
The high stiffness inherent in this stage allows it to be side-driven, yet still retain excellent performance characteristics. The ALS3600 represents a major upgrade in performance over typical side-drive stages.
Brushless Linear Servomotor
The ALS3600 incorporates a high power linear motor to meet the needs of the most demanding applications. This results in a stage with all of the advantages of a direct-drive mechanism: zero backlash, no windup, exceptional acceleration, zero friction and outstanding servo stiffness. Many applications require extreme stability of motion that can only be met with a linear motor drive. Since the drivetrain has zero friction and no recirculating elements, the ALS3600 is ideal for scanning, imaging and many other precision applications.
High-Accuracy Linear Encoder Feedback
The standard feedback device is a high-resolution, noncontact linear encoder. This noncontact encoder offers exceptional repeatability and stability over a range of operating conditions. Both digital and analog output versions are available. The digital version has a resolution of 1 µm, while the analog version, when coupled with an Aerotech multiplier box, can reach resolutions of 20 nm.
Alternate Configurations
All stage travels offer both single- and dual-axis designs, as well as the option for a solid tabletop. Miniature microscope-size stages are available, as are ball-screw-driven versions (please refer to the ATS3600).
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