【各項(xiàng)技術(shù)參數(shù)】
Model               M3500V                     M3500A
流量范圍(N2)   300slpm ~ 1000slpm         300slpm ~ 1000slpm
響應(yīng)時(shí)間            <2 sec                    =""><2>
精準(zhǔn)度             ≤±1% FS                  ≤±1% FS
重復(fù)精度           ±0.25% FS                 ±0.25% FS
輸入/輸出信號(hào)      0~5 Vdc                  0~5 Vdc OR 4~20 mA
供電電源     ±15 Vdc or 24 Vdc, 350mA    ±15 Vdc or 24 Vdc, 350mA
耐壓               <15 bar                    =""><15>
工作環(huán)境溫度       0~50 °C                    0~50 °C
漏率           1*10E-9 atm cc/sec           1*10E-9 atm cc/sec
使用范圍           2 ~ 99% for                2 ~ 99%