High speed, safe and smooth wafer handling

Automatic wafer size detection

Full set of inspection type come as standard: All wafers, programmed, random and statistical

Cassette laser mapping, wafer protrusion, cross-slot detection and critical handling conditions come as standard safety features

PC based controller, Windows 10

Touch screen interface

Designed for Leica DM8000, compatible with many semiconductor inspection microscopes like Nikon, Olympus, Zeiss

Basic bright light inspection available as option