清潔排氣・真空
由于ISP真空泵的泵體不使用潤(rùn)滑油和封水，不存在潤(rùn)滑油的逆擴(kuò)散，因而能獲得干凈的真空。
As ISP vacuum pumps do not contain lubricating oil or sealing water resulting in no back-migration of fluid, it ensures clean vacuum.

輕巧・緊湊
采用雙層重疊的設(shè)計(jì)，產(chǎn)品輕巧緊湊。
It is light-weight and occupies minimum space because of original design called double wrap scroll.

低振動(dòng)・低噪音
由于在旋轉(zhuǎn)葉輪的1周期內(nèi)，吸氣·壓縮·排氣工序連續(xù)完成，因而壓縮轉(zhuǎn)矩的變動(dòng)很小，實(shí)現(xiàn)低振蕩·低噪音性能。
While orbiting scroll makes one turn, the process of suction, compression and exhaust proceeds continuously, resulting in a minimum pulsation which provides less vibration and low noise.

適用于廣泛的壓力領(lǐng)域
采用雙層重疊方式，動(dòng)態(tài)非常穩(wěn)定，可適用于從大氣壓到最后壓力的廣泛壓力領(lǐng)域。無(wú)論是大氣壓還是最后壓力的動(dòng)力變化少，可實(shí)現(xiàn)大氣・ 真空的重復(fù)連續(xù)運(yùn)行。
Due to double-wrap scroll design which is dynamically stable, ISP vacuum pumps can deal with a wide range of applications ranging from atmospheric pressure to the ultimate pressure. There is little power variance between atmospheric pressure and the ultimate pressure, which allows repeated continuous operation between atmospheric pressure and vacuum.

新功能・新結(jié)構(gòu)
通過(guò)改進(jìn)空氣閃噴器功能・密封，提高了水蒸氣·異物的排泄·耐久性·維護(hù)周期
The Air Flush device has been added as a standard feature. Shaft seal configuration has also improved. Due to the Air Flush and the new shaft seal system, reliability and maintenance interval as well as evacuating performance of water vapor and small particles have been now remarkably improved.

・最后壓力是全程壓力測(cè)量值。Ultimate pressure is measured as total pressure.
・噪音值是在無(wú)音室中的測(cè)量值。Noise is measured in an anechoic room.
・（　）內(nèi)尺寸為吸氣口、排氣口為縱向的情況。Figures in parentheses are dimensions when inlet and outlet are placed vertically.

■ 使用用途（Applications）
 
■噴鍍裝置、蒸鍍裝置・離子電鍍裝置
(Sputtering equipment, Vacuum deposition equipment, lon plating equipment)  ■加速器
(Accelerator, Synchrotron Radiation)
■表面修正裝置、電子束加工機(jī)
(Surface modification, Electron beam process) ■真空溶解爐、真空熱處理爐
(Vacuum furnace, Heat treatment furnace)
■氣體循環(huán)・捕集裝置  (Gas recovery devices) ■理化實(shí)驗(yàn)用、分析機(jī)器用 用 (Laboratory use)
■各種排氣裝置  (Vacuum equipment) ■真空包裝機(jī)  (Vacuum packaging machine)
■He泄漏檢測(cè)器  (Leak detectors) ■其他 (Others)
■真空吸附處理 (Device handling system) 　
　
■ 安全注意事項(xiàng)（Precaution on Usage）
 
 
 
■ 這種真空泵是清潔排氣規(guī)格。
請(qǐng)不能排放對(duì)人體有毒的氣體、爆炸火災(zāi)危險(xiǎn)性的氣體、腐蝕性氣體、藥品、溶劑、粉體等物質(zhì)。對(duì)于排放了特殊氣體等的泵本公司不承擔(dān)維護(hù)保修責(zé)任，請(qǐng)予以諒解。
 
　 This pumping system is suitable for clean processes only.
Do not use explosive, flammable, toxic or corrosive substances or substances which contain chemicals, solvents or particles. 阿耐思特巖田IWATA will not perform maintenance work on pumps which have used hazardous substances.
 
■ 使用環(huán)境溫度應(yīng)在5℃～40℃范圍。
 
　 Use at ambient operation temperature in the range of 5℃ to 40℃