Aerotech’s ANT130-XY-ULTRA is a long travel (up to 160 mm x 160 mm) nanopositioner for XY applications. Each axis uses crossed-roller bearings, as well as Aerotech’s unique direct-drive for non-coggin......

● Integrated low-profile XY linear motor stage
● Nanometer-level performance in a large travel format
● 2D system accuracy is 250 nm
● In-position stability of <1 nm
● High dynamic performance

ULTRA Trajectory Management System
In order to achieve the highest possible system accuracy from our multi-axis nanopositioning systems, Aerotech has developed an advanced, interactive, dynamic trajectory management system. To take advantage of this sophisticated interactive calibration system, the mechanical system has to be completely assembled and functionally tested prior to calibration in our best-in-class metrology labs. Nano-level system accuracy can only be achieved under stringent environmental conditions, calibrating with the best test equipment and utilizing the formidable capability of ULTIMUS. By implementing the ULTIMUS dynamic trajectory management system with the ANT130-XY-ULTRA, we are able to produce 2-dimensional accuracies of ±250 nm or better.

The plots provided in the Specifications illustrate performance differences between a standard ANT130-XY and the -ULTRA version. Straightness errors, orthogonality errors and accuracy errors caused by stage yawing are virtually eliminated.