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產品簡介
正置金相顯微鏡BX53M產品介紹：*系統(tǒng)化模塊化的設計能夠實現(xiàn)多種配置，以滿足用戶的各種要求
正置金相顯微鏡BX53M詳細信息
- BX53M反射和反射/透射觀察機架
- 顯微鏡支架
- 鏡筒
- 照明器
- 光源
- 物鏡轉換器
- 滑塊
- BX53M IR觀察
- BX53M偏光觀察
- BXFM系統(tǒng)
正置金相顯微鏡BX53M產品介紹：
*系統(tǒng)化模塊化的設計能夠實現(xiàn)多種配置，以滿足用戶的各種要求。
LED照明
BX53M為反射光和透射光照明提供了高強度的白光LED光源。無論強度是多少，LED都保持著一致的色溫。LED提供了高效而長壽命的照明，是材料學檢測應用的理想工具。
BX53M同時配備了一個適配器，以抬升照明器，適應更高的樣品。
| 機架組合 | 圖號 | 可用于反射光 | 可用于透射光 | 樣品高度 |
|---|---|---|---|---|
| BX53MRF-S | 1 | yes | no | 0-65 mm |
| BX53MTRF-S | 2 | yes | yes | 0-35 mm |
| BX53MRF-S + BX3M-ARMAD | 1、3 | yes | no | 40-105 mm |
| BX53MTRF-S + BX3M-ARMAD | 2、3 | yes | yes | 40-75 mm |
| FN | 類型 | 角度類型 | 圖像 | 屈光度調節(jié)裝置數(shù) | ||
|---|---|---|---|---|---|---|
| 1 | U-BI30-2 | 22 | 雙目 | 固定式 | 倒像 | 1 |
| 2 | U-TBI-3 | 22 | 雙目 | 傾斜式 | 倒像 | 1 |
| 3 | U-TR30-2 | 22 | 三目 | 固定式 | 倒像 | 1 |
| U-TR30IR | 22 | IR用三目 | 固定式 | 倒像 | 2 | |
| U-ETR-4 | 22 | 三目 | 固定式 | 正像 | 2 | |
| U-TTR-2 | 22 | 三目 | 傾斜式 | 倒像 | 2 | |
| U-SWTR-3 | 26.5 | 三目 | 固定式 | 倒像 | 2 | |
| U-SWETTR-5 | 26.5 | 三目 | 傾斜式 | 正像 | 2 | |
| U-TLU | 22 | 單口鏡筒 | — | — | — | |
| U-TLUIR | 22 | IR用單口鏡筒 | — | — | — | |
| 編碼功能 | 光源 | BF | DF | DIC | POL | IR | FL | 混合A | AS/FS | ||
|---|---|---|---|---|---|---|---|---|---|---|---|
| 1 | BX3M-RLAS-S | 3個固定式分光鏡組件位 置 | LED-內置 | yes | yes | yes | yes | yes | yes | ||
| 2 | BX3M-URAS-S | 4個可換裝的分光鏡組件位置 | LED | yes | yes | yes | yes | yes | yes | ||
| 鹵素燈 | yes | yes | yes | yes | yes | yes | yes | ||||
| 汞燈/光導 | yes | yes | yes | yes | yes | yes | yes | ||||
| 3 | BX3M-RLA-S | LED | yes | yes | yes | yes | yes | yes | |||
| 鹵素燈 | yes | yes | yes | yes | yes | yes | yes | ||||
| 4 | BX3M-KMA-S | LED-內置 | yes | yes | yes | yes | |||||
| 5 | BX3-ARM | 透射光觀察專用鏡臂 | |||||||||
| 6 | U-KMAS | LED | yes | yes | yes | yes | |||||
| 鹵素燈 | yes | yes | yes | yes | yes | ||||||
| 物鏡 | 放大倍率 | NA(數(shù)值孔徑) | WD（mm） | 蓋玻片厚度（mm） | 硅厚度（mm） | 分辨率(um)(孔徑光闌全開) |
|---|---|---|---|---|---|---|
| LMPLN-IR | 5X | 0.1 | 23 | 0~0.17 | _ | 6.71 |
| 10X | 0.3 | 18 | 0~0.17 | _ | 2.24 | |
| LCPLN-IR （適合FN22，不適合FN26.5） | 20X | 0.45 | 8.3 | 0~1.2 | 0~1.2 | 1.49(使用1100mm波長) |
| 50X | 0.65 | 4.5 | 0~1.2 | 0~1.2 | 1.03(使用1100mm波長) | |
| 100X | 0.85 | 1.2 | 0~0.07 | 0~1.0 | 0.79（使用1100mm波長） | |
 |  | |||||
| 無校正環(huán)物鏡觀察效果 | 有校正環(huán)物鏡觀察效果 | |||||
正置金相顯微鏡BX53M基本參數(shù)：
SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR GENERAL USE
| Entry | Standard | Advanced | ||||||
| Optical system | UIS2 optical system (infinity-corrected) | ||||||||
| Main unit | Microscope frame | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | ||
| Focus | Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle | ||||||||
| Max. specimen height | Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD) | ||||||||
| Observation tube | Wide field (F.N.22) | U-TR30-2-2 Inverted: trinocular | |||||||
| Illumination | Reflected light Transmitted light | BX3M-KMA-S White LED, BF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking | BX3M-RLAS-S Coded, White LED, BF/DF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking | ||||||
| － | BX3M-LEDT White LED Abbe/long working distance condensers | － | BX3M-LEDT White LED Abbe/long working distance condensers | － | BX3M-LEDT White LED Abbe/long working distance condensers | ||||
| Revolving nosepiece | U-5RE-2 For BF: Quintuple | U-D6BDRE For BF/DF: Sextuple | U-D6BDRES-S For BF/DF : Sextuple, Coded | ||||||
| Eyepiece（F.N.22) | WHN10 WHN10X-H | ||||||||
| MIX observation | － | BX3M-CB Control box BX3M-HS Hａnd switch U-MIXR MIX slider for reflected light observation U-MIXRCBL Cable for MIXR | |||||||
| Condenser (Long working distance) | － | U-LWCD | － | U-LWCD | － | U-LWCD | |||
| Power cable | UYCP (x1) | UYCP (x2) | |||||||
| Weight | Reflected: approx.15.8 kg (microscope frame 7.4 kg) Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg) | ||||||||
| Objectives | MPLFLN set | MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation | － | ||||||
| MPLFLN BD set | － | MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | |||||||
| MPLFLN-BD, LMPLFLN-BD set | － | MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | |||||||
| Stage (X x Y) | 76 mm x 52 mm set | U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment | |||||||
| 100 mm x 10 0mm set | U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis | ||||||||
| 100 mm x 100 (G) mm set | U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate) | ||||||||
| 150 mm x 100 mm set | U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis | ||||||||
| 150 mm x 100 (G) mm set | U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate) | ||||||||
| Option | MIX observation set* | BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL | － | ||||||
| DIC* | U-DICR | ||||||||
| Intermediate Tubes | U-CA, U-EPA2, U-TRU-1-2, U-TRU | ||||||||
| Filters | U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR | ||||||||
| Filter for condenser | 43IF550-W45, U-POT | ||||||||
| Stage plate | U-D6BDRES-S, U-D6RE-ESD-2, U-D6BDRES-ESD, U-5RES-ESD | ||||||||
| Specimen holder | U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4 | ||||||||
| Handle rubber | U-SHG, U-SHGT | ||||||||
*Cannot be used with U-5RE-2.
BX53M / BXFM ESD UNITS
| Items | Microscope frame | BX53MRF-S, BX53MTRF-S |
| Illuminator | BX3M-KMA-S, BX3M-RLA-S, BX3M-URAS-S, BX3M-RLAS-S | |
| Nosepiece | U-D6BDRES-S, U-D6RE-ESD, U-D5BDREMC-ESD, U-5RES-ESD | |
| Stage | U-SIC4R2, U-SIC4L2, U-MSSP4 |
SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR DEDICATED USE
| Fluorescence | Infrared | Polarized | ||||
| Optical system | UIS2 optical system (infinity-corrected) | ||||||
| Main unit | Microscope frame | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/ Transmitted) | BX53MRF-S (Reflected) | BX53MTRF-S (Reflected/Transmitted) | ||
| Focus | Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle | ||||||
| Max. specimen height | Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD) | ||||||
| Observation tube | Wide field (F.N.22) | U-TR30-2 Inverted: trinocular | U-TR30IR Inverted: trinocular for IR | U-TR30-2 Inverted: trinocular | |||
| Polarized Light Intermediate Attachment (U-CPA) | Bertrａnd Lens | － | － | Focusable | |||
| Bertrａnd Field Stop | － | － | ø3.4 mm diameter (fixed) | ||||
| Engage or disengage Bertrａnd lens changeover between orthoscopic and conoscopic observation | － | － | Position of slider ● in Position of slider ○ out | ||||
| Analyzer Slot | － | － | Rotatable Analyzer with Slot (U-AN360P-2) | ||||
| Illumination | Reflected light | FL observation | BX3M-URAS-S Coded, 100 W mercury lamp, 4 position mirror unit turret, (standard: WB, WG, WU+BF etc) With FS, AS (with centering mechanism), With shutter mechanism | － | － | ||
| IR observation | － | BX3M-RLA-S 100W halogen lamp for IR, BF/IR, AS (with centering mechanism) U-LH100IR (Including 12V 10W HAL-L) 100W Halogen light source for IR TH4-100 100W power supply TH4-HS Hａnd switch U-RMT Extension cord | － | ||||
| Transmitted light | POL observation | － | － | BX3M-LEDT White LED Abbe/long working distance condensers | |||
| Revolving nosepiece | U-D6BDRES-S For BF/DF : Sextuple, Coded | U-5RE-2 For BF : Quintuple | U-P4RE Quadruple, centerable attachable components 1/4 wavelength retardation plate (U-TAD), tint plate (U-TP530) and various compensators can be attached using plate adapter (U-TAD) | ||||
| Eyepiece（F.N.22) | WHN10X | ||||||
| WHN10X-H | CROSS-WHN10X | ||||||
| Mirror units | U-FDF For BF, detectable ND filter U-FBFL For BF, built-in ND filter U-FWUS For Ultra Violet-FL U-FWBS For Blue-FL U-FWGS For Green-FL | － | |||||
| Filter / Polarizer / Analyzer | U-25FR Frost filter | U-BP1100IR/U-BP1200IR Bａnd path filters for IR | 43IF550-W45 Green filter | ||||
| U-POIR Reflected polarizer slider for IR | U-AN360IR Rotatable analyzer slider for IR | U-AN360P-2 360° Dial-rotatable Rotatable minimum angle 0.1° | |||||
| Condenser | U-LWCD Long working distance | － | U-POC-2 Achromat strain-free condenser. 360°rotatable polarizer with swing-out achromatic top-lens. Click stop at position "0°" is adjustable. NA 0.9 (top-lens in) / NA 0.18 (top-lens out) Aperture iris diaphragm: adjustable from 2 mm to 21 mm diameters | ||||
| Slider / Compensators | － | U-TAD Slider (Plate adapter) | |||||
| U-TP530 / U-TP137 Compensators | |||||||
| Power cable | UYCP (x1) | UYCP (x2) | UYCP (x1) | ||||
| Weight | Reflected: approx.15.8 kg (microscope frame 7.4 kg) | Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg) | Approx.18.9 kg (microscope frame 7.4 kg) | Approx.16.2 kg (microscope frame 7.6 kg) | |||
| Reflected FL light source | Light guide | U-HGLGPS, U-LLGAD, U-LLG150, SHI-130OL Light guide set | － | － | |||
| Mercury lamp | U-LH100HGAPO1-7, USH-103OL (x2), U-RFL-T, U-RCV Mercury lamp set | － | － | ||||
| Objectives | MPLFLN set | MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation | － | － | |||
| MPLFLN BD set | MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | － | － | ||||
| MPLFLN-BD, LMPLFLN-BD set | MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation | － | － | ||||
| IR set | － | LMPLN5XIR,10XIR,LCPLN20XIR,50XIR,100XIR IR observation | － | ||||
| POL set | － | － | UPLFLN4XP,10XP,20XP,40XP POL observation | ||||
| Stage (X x Y) | 76 mm x 52 mm set | U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment | |||||
| 100 mm x 10 0mm set | U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis | ||||||
| 100 mm x 100 (G) mm set | U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate) | ||||||
| 150 mm x 100 mm set | U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis | ||||||
| 150 mm x 100 (G) mm set | U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate) | ||||||
| POL set | － | I-SRP-1-2+U-FMP Polarizing rotatable stage + Mechanical stage | |||||
| Option | MIX observation set* | BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL | |||||
| DIC* | U-DICR | ||||||
| Intermediate Tubes | U-CA, U-EPA2, U-TRU-1-2, U-TRU | ||||||
| Filters | U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR | ||||||
| Filter for condenser | 43IF550-W45, U-POT | ||||||
| Stage plate | U-WHP64, BH2-WHR43, BH2-WHR54, BH2-WHR65, U-WHP2, BH2-WHR43 | ||||||
| Specimen holder | U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4 | ||||||
| Handle rubber | U-SHG, U-SHGT | ||||||
*Cannot be used with U-5RE-2
正置金相顯微鏡BX53M產品應用：
反射光顯微鏡檢查涵蓋的應用和行業(yè)非常廣泛，下面僅選擇了使用不同觀察方法效果的部分示例。 |  |
| 暗場觀察表面貼裝基板：DF 暗場能夠觀察標本上的散射或衍射光。任何不平整的部位都會反射這種光，而平整的部位則顯得很暗，因此缺陷部位就會清晰地顯示出來。用戶甚至可以識別出極細微的劃痕，或小到8nm級別的缺陷 – 比光學顯微鏡的分辨能力還要小。 因此，暗場是檢測標本上細微劃痕或缺陷，以及鏡面標本（包括晶圓）的理想工具。 | 微分干涉觀察球墨鑄鐵檢測：DIC 微分干涉是一種顯微鏡觀察技術，這種技術把明場觀察所不能檢測到的標本高度差，變?yōu)楦〉駹罨蛉S圖像，改善了圖像襯度。該技術使用了偏光，并有三種專門定制設計的棱鏡可以選擇。它是檢查具有極細微高度差的標本的理想工具，包括金相組織、礦石、磁頭、硬盤介質和拋光晶圓表面。 |
 |  |
| 熒光觀察半導體晶圓上的顆粒異物：FL 該技術用于通過專用濾色片激發(fā)塊照明，使標本能夠發(fā)出熒光（發(fā)出不同波長的光），特定的激發(fā)塊可用于特定的應用。它適合于檢查半導體晶圓上的異物、光阻殘留物，以及通過熒光染料檢測裂縫。可以選配復消色差集光鏡系統(tǒng)的燈箱，以補償從可見光到近紅外光的色差。 | 紅外光觀察電極切片：IR IR觀察是非破壞性地檢查可以透過紅外光的硅材料或玻璃材料構成的電子元器件內部的方法。 |
 | |
| 透射光觀察LCD彩色濾光片：TLBF+HDR 對于透明樣品，比如LCD、塑料和玻璃材料，可以使用各種聚光鏡進行透射光觀察。組建一個光學系統(tǒng)，實現(xiàn)透射光明場和偏光進行樣品檢查非常方便。 | |
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