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正置金相顯微鏡BX53M

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公司名稱大悅維佳（北京）科技有限公司
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更新時間2021/7/20 22:51:06
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大悅維佳（北京）科技有限公司成立于2009年7月，地處北京市中關(guān)村科技園海淀園區(qū)，是一家從事顯微觀察領(lǐng)域相關(guān)產(chǎn)品的設(shè)計、方案集成及銷售、技術(shù)服務(wù)為一體的高科技企業(yè)。

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正置金相顯微鏡BX53M產(chǎn)品介紹：*系統(tǒng)化模塊化的設(shè)計能夠?qū)崿F(xiàn)多種配置，以滿足用戶的各種要求

正置金相顯微鏡BX53M 產(chǎn)品信息

正置金相顯微鏡BX53M產(chǎn)品介紹：

*系統(tǒng)化

LED照明

BX53M反射和反射/透射觀察機架

機架組合	圖號	可用于反射光	可用于透射光	樣品高度
BX53MRF-S	1	yes	no	0-65 mm
BX53MTRF-S	2	yes	yes	0-35 mm
BX53MRF-S + BX3M-ARMAD	1、3	yes	no	40-105 mm
BX53MTRF-S + BX3M-ARMAD	2、3	yes	yes	40-75 mm

顯微鏡支架

鏡筒

		FN	類型	角度類型	圖像	屈光度調(diào)節(jié)裝置數(shù)
1	U-BI30-2	22	雙目	固定式	倒像	1
2	U-TBI-3	22	雙目	傾斜式	倒像	1
3	U-TR30-2	22	三目	固定式	倒像	1
	U-TR30IR	22	IR用三目	固定式	倒像	2
	U-ETR-4	22	三目	固定式	正像	2
	U-TTR-2	22	三目	傾斜式	倒像	2
	U-SWTR-3	26.5	三目	固定式	倒像	2
	U-SWETTR-5	26.5	三目	傾斜式	正像	2
	U-TLU	22	單口鏡筒	—	—	—
	U-TLUIR	22	IR用單口鏡筒	—	—	—

照明器

		編碼功能	光源	BF	DF	DIC	POL	IR	FL	混合A	AS/FS
1	BX3M-RLAS-S	3個固定式分光鏡組件位置	LED-內(nèi)置	yes	yes	yes	yes			yes	yes
2	BX3M-URAS-S	4個可換裝的分光鏡組件位置	LED	yes	yes	yes	yes			yes	yes
			鹵素燈	yes	yes	yes	yes	yes		yes	yes
			汞燈/光導(dǎo)	yes	yes	yes	yes		yes	yes	yes
3	BX3M-RLA-S		LED	yes	yes	yes	yes			yes	yes
3	BX3M-RLA-S		鹵素燈	yes	yes	yes	yes	yes		yes	yes
4	BX3M-KMA-S		LED-內(nèi)置	yes		yes	yes			yes
5	BX3-ARM	透射光觀察專用鏡臂
6	U-KMAS		LED	yes		yes	yes			yes
6	U-KMAS		鹵素燈	yes		yes	yes	yes		yes

光源

物鏡轉(zhuǎn)換器

物鏡和滑塊的附件。選擇所需的物鏡數(shù)量和類型；以及是否帶滑塊附件。

滑塊

選擇DIC滑塊來補充常規(guī)的明場觀察。采用DIC滑塊后，在獲取有關(guān)樣品的形貌信息時，可以選擇高對比度型或高分辨率型。MIX組合式照明使用起來非常靈活，它在暗場光路中提供了分區(qū)的LED光源。

BX53M IR觀察

物鏡	放大倍率	NA(數(shù)值孔徑)	WD（mm）	蓋玻片厚度（mm）	硅厚度（mm）	分辨率(um)(孔徑光闌全開)
LMPLN-IR	5X	0.1	23	0~0.17	_	6.71
LMPLN-IR	10X	0.3	18	0~0.17	_	2.24
LCPLN-IR （適合FN22，不適合FN26.5）	20X	0.45	8.3	0~1.2	0~1.2	1.49(使用1100mm波長)
	50X	0.65	4.5	0~1.2	0~1.2	1.03(使用1100mm波長)
	100X	0.85	1.2	0~0.07	0~1.0	0.79（使用1100mm波長）

	無校正環(huán)物鏡觀察效果			有校正環(huán)物鏡觀察效果

BX53M偏光觀察

BXFM系統(tǒng)

正置金相顯微鏡BX53M基本參數(shù)：

SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR GENERAL USE

			Entry		Standard		Advanced
Optical system			UIS2 optical system (infinity-corrected)
Main unit	Microscope frame		BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/Transmitted)	BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/Transmitted)	BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/Transmitted)
	Focus		Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle
	Max. specimen height		Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD)
	Observation tube	Wide field (F.N.22)	U-TR30-2-2 Inverted: trinocular
	Illumination	Reflected light Transmitted light	BX3M-KMA-S White LED, BF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking		BX3M-RLAS-S Coded, White LED, BF/DF/DIC/POL/MIX FS, AS (with centering mechanism), BF/DF interlocking
			－	BX3M-LEDT White LED Abbe/long working distance condensers	－	BX3M-LEDT White LED Abbe/long working distance condensers	－	BX3M-LEDT White LED Abbe/long working distance condensers
	Revolving nosepiece		U-5RE-2 For BF: Quintuple		U-D6BDRE For BF/DF: Sextuple			U-D6BDRES-S For BF/DF : Sextuple, Coded
	Eyepiece（F.N.22)		WHN10 WHN10X-H
	MIX observation		－					BX3M-CB Control box BX3M-HS Hａnd switch U-MIXR MIX slider for reflected light observation U-MIXRCBL Cable for MIXR
	Condenser (Long working distance)		－	U-LWCD	－	U-LWCD	－	U-LWCD
	Power cable		UYCP (x1)					UYCP (x2)
	Weight		Reflected: approx.15.8 kg (microscope frame 7.4 kg) Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg)
Objectives	MPLFLN set		MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation		－
	MPLFLN BD set		－		MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation
	MPLFLN-BD, LMPLFLN-BD set		－		MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation
Stage (X x Y)	76 mm x 52 mm set		U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment
	100 mm x 10 0mm set		U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis
	100 mm x 100 (G) mm set		U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate)
	150 mm x 100 mm set		U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis
	150 mm x 100 (G) mm set		U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate)
Option	MIX observation set*		BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL				－
	DIC*		U-DICR
	Intermediate Tubes		U-CA, U-EPA2, U-TRU-1-2, U-TRU
	Filters		U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR
	Filter for condenser		43IF550-W45, U-POT
	Stage plate		U-D6BDRES-S, U-D6RE-ESD-2, U-D6BDRES-ESD, U-5RES-ESD
	Specimen holder		U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4
	Handle rubber		U-SHG, U-SHGT

_{*Cannot be used with U-5RE-2.}

BX53M / BXFM ESD UNITS

Items	Microscope frame	BX53MRF-S, BX53MTRF-S
	Illuminator	BX3M-KMA-S, BX3M-RLA-S, BX3M-URAS-S, BX3M-RLAS-S
	Nosepiece	U-D6BDRES-S, U-D6RE-ESD, U-D5BDREMC-ESD, U-5RES-ESD
	Stage	U-SIC4R2, U-SIC4L2, U-MSSP4

SPECIFICATIONS OF BX53M SUGGESTED CONFIGURATION FOR DEDICATED USE

				Fluorescence		Infrared	Polarized
Optical system				UIS2 optical system (infinity-corrected)
Main unit	Microscope frame			BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/ Transmitted)	BX53MRF-S (Reflected)	BX53MTRF-S (Reflected/Transmitted)
	Focus			Stroke: 25 mm Fine stroke per rotation: 100 μm Minimum graduation: 1 μm With upper limit stopper, torque adjustment for coarse handle
	Max. specimen height			Reflected: 65 mm (w/o spacer), 105 mm (with BX3M-ARMAD) Reflected/Transmitted: 35 mm (w/o spacer), 75 mm (with BX3M-ARMAD)
	Observation tube	Wide field (F.N.22)		U-TR30-2 Inverted: trinocular		U-TR30IR Inverted: trinocular for IR	U-TR30-2 Inverted: trinocular
		Polarized Light Intermediate Attachment (U-CPA)	Bertrａnd Lens	－		－	Focusable
			Bertrａnd Field Stop	－		－	ø3.4 mm diameter (fixed)
			Engage or disengage Bertrａnd lens changeover between orthoscopic and conoscopic observation	－		－	Position of slider ● in Position of slider ○ out
			Analyzer Slot	－		－	Rotatable Analyzer with Slot (U-AN360P-2)
	Illumination	Reflected light	FL observation	BX3M-URAS-S Coded, 100 W mercury lamp, 4 position mirror unit turret, (standard: WB, WG, WU+BF etc) With FS, AS (with centering mechanism), With shutter mechanism		－	－
			IR observation	－		BX3M-RLA-S 100W halogen lamp for IR, BF/IR, AS (with centering mechanism) U-LH100IR (Including 12V 10W HAL-L) 100W Halogen light source for IR TH4-100 100W power supply TH4-HS Hａnd switch U-RMT Extension cord	－
		Transmitted light	POL observation	－		－	BX3M-LEDT White LED Abbe/long working distance condensers
	Revolving nosepiece			U-D6BDRES-S For BF/DF : Sextuple, Coded		U-5RE-2 For BF : Quintuple	U-P4RE Quadruple, centerable attachable components 1/4 wavelength retardation plate (U-TAD), tint plate (U-TP530) and various compensators can be attached using plate adapter (U-TAD)
	Eyepiece（F.N.22)			WHN10X
				WHN10X-H			CROSS-WHN10X
	Mirror units			U-FDF For BF, detectable ND filter U-FBFL For BF, built-in ND filter U-FWUS For Ultra Violet-FL U-FWBS For Blue-FL U-FWGS For Green-FL		－
	Filter / Polarizer / Analyzer			U-25FR Frost filter		U-BP1100IR/U-BP1200IR Bａnd path filters for IR	43IF550-W45 Green filter
				U-POIR Reflected polarizer slider for IR		U-AN360IR Rotatable analyzer slider for IR	U-AN360P-2 360° Dial-rotatable Rotatable minimum angle 0.1°
	Condenser			U-LWCD Long working distance		－	U-POC-2 Achromat strain-free condenser. 360°rotatable polarizer with swing-out achromatic top-lens. Click stop at position "0°" is adjustable. NA 0.9 (top-lens in) / NA 0.18 (top-lens out) Aperture iris diaphragm: adjustable from 2 mm to 21 mm diameters
	Slider / Compensators			－			U-TAD Slider (Plate adapter)
							U-TP530 / U-TP137 Compensators
	Power cable			UYCP (x1)		UYCP (x2)	UYCP (x1)
	Weight			Reflected: approx.15.8 kg (microscope frame 7.4 kg)	Reflected/transmitted: approx. 18.3 kg (microscope frame 7.6 kg)	Approx.18.9 kg (microscope frame 7.4 kg)	Approx.16.2 kg (microscope frame 7.6 kg)
Reflected FL light source	Light guide			U-HGLGPS, U-LLGAD, U-LLG150, SHI-130OL Light guide set		－	－
	Mercury lamp			U-LH100HGAPO1-7, USH-103OL (x2), U-RFL-T, U-RCV Mercury lamp set		－	－
Objectives	MPLFLN set			MPLFLN5X, 10X, 20X, 50X, 100X BF/DIC/POL/FL observation		－	－
	MPLFLN BD set			MPLFLN5XBD, 10XBD, BD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation		－	－
	MPLFLN-BD, LMPLFLN-BD set			MPLFLN5XBD, 10XBD, LMPLFLN20XBD, 50XBD, 100XBD BF/DF/DIC/POL/FL observation		－	－
	IR set			－		LMPLN5XIR,10XIR,LCPLN20XIR,50XIR,100XIR IR observation	－
	POL set			－		－	UPLFLN4XP,10XP,20XP,40XP POL observation
Stage (X x Y)	76 mm x 52 mm set			U-SVRM, U-MSSP Coaxial left handle stage / 76 (X) × 52 (Y) mm, with torque adjustment
	100 mm x 10 0mm set			U-SIC4R2, U-MSSP4 Large-size coaxial left handle stage / 100 (X) x 100 (Y) mm, with lock mechanism in Y axis
	100 mm x 100 (G) mm set			U-SIC4R2, U-MSSPG Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with lock mechanism in Y axis (Glass plate)
	150 mm x 100 mm set			U-SIC64, U-SHG, U-SP64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis
	150 mm x 100 (G) mm set			U-SIC64, U-SHG, U-SPG64 Large-size coaxial right handle stage / 150 (X) x 100 (Y) mm, with torque adjustment, with lock mechanism in Y axis (Glass plate)
	POL set			－			I-SRP-1-2+U-FMP Polarizing rotatable stage + Mechanical stage
Option	MIX observation set*			BX3M-CB, BX3M-HS, U-MIXR, U-MIXRCBL
	DIC*			U-DICR
	Intermediate Tubes			U-CA, U-EPA2, U-TRU-1-2, U-TRU
	Filters			U-25ND6, U-25ND25, U-25LBD, U-25LBA, U-25Y48, U-AN360-3, U-AN360P, U-PO3, U-POTP3, U-25IF550, U-25L42, U-25, U-25FR
	Filter for condenser			43IF550-W45, U-POT
	Stage plate			U-WHP64, BH2-WHR43, BH2-WHR54, BH2-WHR65, U-WHP2, BH2-WHR43
	Specimen holder			U-HRD-4, U-HLD-4, U-HRDT-4, U-HLDT-4
	Handle rubber			U-SHG, U-SHGT

_{*Cannot be used with U-5RE-2}

正置金相顯微鏡BX53M產(chǎn)品應(yīng)用：


暗場觀察表面貼裝基板：DF 暗場能夠觀察標本上的散射或衍射光。任何不平整的部位都會反射這種光，而平整的部位則顯得很暗，因此缺陷部位就會清晰地顯示出來。用戶甚至可以識別出極細微的劃痕，或小到8nm級別的缺陷 – 比光學顯微鏡的分辨能力還要小。因此，暗場是檢測標本上細微劃痕或缺陷，以及鏡面標本（包括晶圓）的理想工具。	微分干涉觀察球墨鑄鐵檢測：DIC 微分干涉是一種顯微鏡觀察技術(shù)，這種技術(shù)把明場觀察所不能檢測到的標本高度差，變?yōu)楦〉駹罨蛉S圖像，改善了圖像襯度。該技術(shù)使用了偏光，并有三種專門定制設(shè)計的棱鏡可以選擇。它是檢查具有極細微高度差的標本的理想工具，包括金相組織、礦石、磁頭、硬盤介質(zhì)和拋光晶圓表面。

熒光觀察半導(dǎo)體晶圓上的顆粒異物：FL 該技術(shù)用于通過專用濾色片激發(fā)塊照明，使標本能夠發(fā)出熒光（發(fā)出不同波長的光），特定的激發(fā)塊可用于特定的應(yīng)用。它適合于檢查半導(dǎo)體晶圓上的異物、光阻殘留物，以及通過熒光染料檢測裂縫?？梢赃x配復(fù)消色差集光鏡系統(tǒng)的燈箱，以補償從可見光到近紅外光的色差。	紅外光觀察電極切片：IR IR觀察是非破壞性地檢查可以透過紅外光的硅材料或玻璃材料構(gòu)成的電子元器件內(nèi)部的方法。

透射光觀察LCD彩色濾光片：TLBF+HDR 對于透明樣品，比如LCD、塑料和玻璃材料，可以使用各種聚光鏡進行透射光觀察。組建一個光學系統(tǒng)，實現(xiàn)透射光明場和偏光進行樣品檢查非常方便。